Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches.
about
Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches.
description
2017 nî lūn-bûn
@nan
2017年の論文
@ja
2017年学术文章
@wuu
2017年学术文章
@zh-cn
2017年学术文章
@zh-hans
2017年学术文章
@zh-my
2017年学术文章
@zh-sg
2017年學術文章
@yue
2017年學術文章
@zh
2017年學術文章
@zh-hant
name
Plasma-assisted atomic layer d ...... in high aspect ratio trenches.
@en
Plasma-assisted atomic layer d ...... in high aspect ratio trenches.
@nl
type
label
Plasma-assisted atomic layer d ...... in high aspect ratio trenches.
@en
Plasma-assisted atomic layer d ...... in high aspect ratio trenches.
@nl
prefLabel
Plasma-assisted atomic layer d ...... in high aspect ratio trenches.
@en
Plasma-assisted atomic layer d ...... in high aspect ratio trenches.
@nl
P2093
P2860
P50
P356
P1476
Plasma-assisted atomic layer d ...... in high aspect ratio trenches
@en
P2093
I J M Erkens
W M M Kessels
P2860
P304
P356
10.1063/1.4972120
P407
P577
2017-02-01T00:00:00Z