SFG analysis of the molecular structures at the surfaces and buried interfaces of PECVD ultralow-dielectric constant pSiCOH: Reactive ion etching and dielectric recovery
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SFG analysis of the molecular structures at the surfaces and buried interfaces of PECVD ultralow-dielectric constant pSiCOH: Reactive ion etching and dielectric recovery
description
im Mai 2017 veröffentlichter wissenschaftlicher Artikel
@de
wetenschappelijk artikel
@nl
наукова стаття, опублікована в травні 2017
@uk
name
SFG analysis of the molecular ...... tching and dielectric recovery
@en
SFG analysis of the molecular ...... tching and dielectric recovery
@nl
type
label
SFG analysis of the molecular ...... tching and dielectric recovery
@en
SFG analysis of the molecular ...... tching and dielectric recovery
@nl
prefLabel
SFG analysis of the molecular ...... tching and dielectric recovery
@en
SFG analysis of the molecular ...... tching and dielectric recovery
@nl
P2093
P2860
P356
P1476
SFG analysis of the molecular ...... tching and dielectric recovery
@en
P2093
Alfred Grill
Hosadurga Shobha
Huai Huang
John N. Myers
Xiaoxian Zhang
P2860
P304
P356
10.1063/1.4982654
P407
P577
2017-05-01T00:00:00Z