SFG analysis of the molecular structures at the surfaces and buried interfaces of PECVD ultralow-dielectric constant pSiCOH: Reactive ion etching and dielectric recovery

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SFG analysis of the molecular structures at the surfaces and buried interfaces of PECVD ultralow-dielectric constant pSiCOH: Reactive ion etching and dielectric recovery

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im Mai 2017 veröffentlichter wissenschaftlicher Artikel

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wetenschappelijk artikel

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наукова стаття, опублікована в травні 2017

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SFG analysis of the molecular ...... tching and dielectric recovery

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SFG analysis of the molecular ...... tching and dielectric recovery

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SFG analysis of the molecular ...... tching and dielectric recovery

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SFG analysis of the molecular ...... tching and dielectric recovery

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SFG analysis of the molecular ...... tching and dielectric recovery

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SFG analysis of the molecular ...... tching and dielectric recovery

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P1476

SFG analysis of the molecular ...... tching and dielectric recovery

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Alfred Grill

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Hosadurga Shobha

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Huai Huang

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John N. Myers

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Xiaoxian Zhang

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Zhan Chen

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P2860

Investigating buried polymer interfaces using sum frequency generation vibrational spectroscopy.

Second harmonic generation, sum frequency generation, and chi(3): dissecting environmental interfaces with a nonlinear optical Swiss Army knife.

Ice-nucleating bacteria control the order and dynamics of interfacial water

Phase-sensitive sum-frequency spectroscopy.

Molecular-level surface structure from nonlinear vibrational spectroscopy combined with simulations.

Advanced single precursor based pSiCOH k = 2.4 for ULSI interconnects

SFG analysis of the molecular structures at the surfaces and buried interfaces of PECVD ultralow-dielectric constant pSiCOH

Nondestructive in Situ Characterization of Molecular Structures at the Surface and Buried Interface of Silicon-Supported Low-k Dielectric Films

Plasma Treatment Effects on Molecular Structures at Dense and Porous Low-k SiCOH Film Surfaces and Buried Interfaces

Probing the molecular structures of plasma-damaged and surface-repaired low-k dielectrics

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182902

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scholarly article

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10.1063/1.4982654

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English

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110

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2017-05-01T00:00:00Z

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