Front end of line

The front-end-of-line (FEOL) is the first portion of IC fabrication where the individual devices (transistors, capacitors, resistors, etc.) are patterned in the semiconductor. FEOL generally covers everything up to (but not including) the deposition of metal interconnect layers. FEOL contains all processes of CMOS fabrication needed to form fully isolated CMOS elements:

Front end of line

The front-end-of-line (FEOL) is the first portion of IC fabrication where the individual devices (transistors, capacitors, resistors, etc.) are patterned in the semiconductor. FEOL generally covers everything up to (but not including) the deposition of metal interconnect layers. FEOL contains all processes of CMOS fabrication needed to form fully isolated CMOS elements: