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pecvd
pecvd
https://triplydb.com/EltonPan/MatKGtest/pecvd
H
_CHM_SMT_
pecvd
https://triplydb.com/EltonPan/MatKGtest/pecvd
_SMT_CHM_
H
Si
silicon
_SMT_DSC_
films
layer
_SMT_SMT_
plasma%20enhanced%20chemical%20vapor%20deposition