Bulk micromachining
Bulk micromachining is a process used to produce micromachinery or microelectromechanical systems (MEMS). Unlike surface micromachining, which uses a succession of thin film deposition and selective etching, bulk micromachining defines structures by selectively etching inside a substrate. Whereas surface micromachining creates structures on top of a substrate, bulk micromachining produces structures inside a substrate.
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Bulk micromachining
Bulk micromachining is a process used to produce micromachinery or microelectromechanical systems (MEMS). Unlike surface micromachining, which uses a succession of thin film deposition and selective etching, bulk micromachining defines structures by selectively etching inside a substrate. Whereas surface micromachining creates structures on top of a substrate, bulk micromachining produces structures inside a substrate.
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Bulk micromachining is a proce ...... in early, low-budget research.
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バルクマイクロマシニングとは、MEMS(マイクロマシン)作製 ...... より、シリコンに対する垂直な深掘りエッチングが可能となった。
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Bulk micromachining is a proce ...... structures inside a substrate.
@en
バルクマイクロマシニングとは、MEMS(マイクロマシン)作製 ...... より、シリコンに対する垂直な深掘りエッチングが可能となった。
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Bulk micromachining
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バルクマイクロマシニング
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