PTSTS
/
iris
/
Login
Register
TriplyDB
Iris Dataset
Browser
Table
SPARQL
Graphs
6
6
Services
1
1
Assets
6
6
Insights
Schema
BETA
Class frequency
Class hierarchy
Etching (microfabrication)
Etching (microfabrication)
Concept
http://dbpedia.org/resource/Category:Etching_(microfabrication)
Advanced silicon etching
Atomic layer etching
Buffered oxide etch
Deep reactive-ion etching
Dry etching
Etching (microfabrication)
Plasma-immersion ion implantation
Reactive-ion etching
Undercut (etching)
Wright etch
Link from a Wikipage to another Wikipage
Advanced silicon etching
Atomic layer etching
Buffered oxide etch
Deep reactive-ion etching
Dry etching
Etching (microfabrication)
Plasma-immersion ion implantation
Reactive-ion etching
Undercut (etching)
Wright etch
subject
Etching (microfabrication)
Concept
http://dbpedia.org/resource/Category:Etching_(microfabrication)
Wikipage page ID
14,641,299
http://www.w3.org/2001/XMLSchema#integer
Wikipage revision ID
474,557,107
http://www.w3.org/2001/XMLSchema#integer
wikiPageUsesTemplate
Template:Cat_main
Template:Commons_cat
type
Concept
label
Etching (microfabrication)
@en
broader
Etching
Microtechnology
Semiconductor device fabrication
prefLabel
Etching (microfabrication)
@en
wasDerivedFrom
Category:Etching_(microfabrication)?oldid=474557107&ns=14