Buddhism was first actively disseminated in Tibet from the 6th to the 9th century CE, predominantly from India. During the Era of Fragmentation (9th–10th centuries), Buddhism waned in Tibet, only to rise again in the 11th century. With the Mongol invasion of Tibet in the 13th century and the establishment of the Mongol Yuan dynasty, Tibetan Buddhism spread beyond Tibet to Mongolia and China. From the 14th to the 20th century, Tibetan Buddhism was patronized by the Chinese Ming dynasty (1368–1644) and the Manchurian Qing dynasty (1644–1912).