A microvalve is microscale valve, i.e. a microfluidic two-port component that regulates the flow between two fluidic ports. Microvalves are basic components in microfluidic devices, such as Labs-on-a-chip, where they are used to control the fluidic transport. During the period 1995-2005, a lot of Microelectromechanical systems-based microvalves were developed.