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SMLL.201601801
SMLL.201601801
http://dx.doi.org/10.1002/SMLL.201601801
Highly Manufacturable Deep (Sub-Millimeter) Etching Enabled High Aspect Ratio Complex Geometry Lego-Like Silicon Electronics.
P356
Q52734544-BFD24857-72D0-470A-92EC-BE860D194D29
P356
SMLL.201601801
http://dx.doi.org/10.1002/SMLL.201601801