Characterization of freestanding photoresist films for biological and MEMS applications
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Characterization of freestanding photoresist films for biological and MEMS applications
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article científic
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article scientifique
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articolo scientifico
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artigo científico
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bilimsel makale
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scientific article published on February 2013
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vedecký článok
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vetenskaplig artikel
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videnskabelig artikel
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vědecký článek
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Characterization of freestanding photoresist films for biological and MEMS applications
@en
Characterization of freestanding photoresist films for biological and MEMS applications.
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label
Characterization of freestanding photoresist films for biological and MEMS applications
@en
Characterization of freestanding photoresist films for biological and MEMS applications.
@nl
prefLabel
Characterization of freestanding photoresist films for biological and MEMS applications
@en
Characterization of freestanding photoresist films for biological and MEMS applications.
@nl
P2093
P2860
P356
P1476
Characterization of freestanding photoresist films for biological and MEMS applications
@en
P2093
D M Ornoff
N L Allbritton
P2860
P356
10.1088/0960-1317/23/2/025009
P577
2013-02-01T00:00:00Z