Topologically Optimized Nano-Positioning Stage Integrating with a Capacitive Comb Sensor.
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Topologically Optimized Nano-Positioning Stage Integrating with a Capacitive Comb Sensor.
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article científic
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article scientifique
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articolo scientifico
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artigo científico
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bilimsel makale
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scientific article published on 28 January 2017
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vedecký článok
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vetenskaplig artikel
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videnskabelig artikel
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vědecký článek
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Topologically Optimized Nano-Positioning Stage Integrating with a Capacitive Comb Sensor.
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Topologically Optimized Nano-Positioning Stage Integrating with a Capacitive Comb Sensor.
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Topologically Optimized Nano-Positioning Stage Integrating with a Capacitive Comb Sensor.
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Topologically Optimized Nano-Positioning Stage Integrating with a Capacitive Comb Sensor.
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Topologically Optimized Nano-Positioning Stage Integrating with a Capacitive Comb Sensor.
@en
Topologically Optimized Nano-Positioning Stage Integrating with a Capacitive Comb Sensor.
@nl
P2093
P2860
P356
P1433
P1476
Topologically Optimized Nano-Positioning Stage Integrating with a Capacitive Comb Sensor
@en
P2093
Huicong Liu
Lining Sun
Pengbo Wang
Yaqiong Wang
P2860
P356
10.3390/S17020257
P407
P50
P577
2017-01-28T00:00:00Z