A comparison between conventional and collapse-mode capacitive micromachined ultrasonic transducers in 10-MHz 1-D arrays.
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Piezoelectric micromachined ultrasound transducer (PMUT) arrays for integrated sensing, actuation and imaging.CMUTs with high-K atomic layer deposition dielectric material insulation layerHigh-Efficiency Output Pressure Performance Using Capacitive Micromachined Ultrasonic Transducers with Substrate-Embedded Springs
P2860
A comparison between conventional and collapse-mode capacitive micromachined ultrasonic transducers in 10-MHz 1-D arrays.
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A comparison between conventio ...... nsducers in 10-MHz 1-D arrays.
@en
A comparison between conventio ...... nsducers in 10-MHz 1-D arrays.
@nl
type
label
A comparison between conventio ...... nsducers in 10-MHz 1-D arrays.
@en
A comparison between conventio ...... nsducers in 10-MHz 1-D arrays.
@nl
prefLabel
A comparison between conventio ...... nsducers in 10-MHz 1-D arrays.
@en
A comparison between conventio ...... nsducers in 10-MHz 1-D arrays.
@nl
P356
P1476
A comparison between conventio ...... nsducers in 10-MHz 1-D arrays.
@en
P2093
Butrus T Khuri-Yakub
Kwan Kyu Park
P304
P356
10.1109/TUFFC.2013.2688
P50
P577
2013-06-01T00:00:00Z