A novel hybrid patterning technique for micro and nanochannel fabrication by integrating hot embossing and inverse UV photolithography.
about
Fundamental studies of nanofluidics: nanopores, nanochannels, and nanopipetsIntegrated optofluidic-microfluidic twin channels: toward diverse application of lab-on-a-chip systems.A novel 2D silicon nano-mold fabrication technique for linear nanochannels over a 4 inch diameter substrate.Unconventional micro-/nanofabrication technologies for hybrid-scale lab-on-a-chip.Mixed-scale channel networks including Kingfisher-beak-shaped 3D microfunnels for efficient single particle entrapment.
P2860
A novel hybrid patterning technique for micro and nanochannel fabrication by integrating hot embossing and inverse UV photolithography.
description
2014 nî lūn-bûn
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2014年の論文
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2014年学术文章
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2014年学术文章
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2014年学术文章
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2014年学术文章
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2014年学术文章
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name
A novel hybrid patterning tech ...... d inverse UV photolithography.
@en
A novel hybrid patterning tech ...... d inverse UV photolithography.
@nl
type
label
A novel hybrid patterning tech ...... d inverse UV photolithography.
@en
A novel hybrid patterning tech ...... d inverse UV photolithography.
@nl
prefLabel
A novel hybrid patterning tech ...... d inverse UV photolithography.
@en
A novel hybrid patterning tech ...... d inverse UV photolithography.
@nl
P2093
P2860
P356
P1433
P1476
A novel hybrid patterning tech ...... d inverse UV photolithography.
@en
P2093
P2860
P304
P356
10.1039/C3LC51369F
P577
2014-03-20T00:00:00Z