A three-mask process for fabricating vacuum-sealed capacitive micromachined ultrasonic transducers using anodic bonding.
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A three-mask process for fabricating vacuum-sealed capacitive micromachined ultrasonic transducers using anodic bonding.
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name
A three-mask process for fabri ...... nsducers using anodic bonding.
@en
A three-mask process for fabri ...... nsducers using anodic bonding.
@nl
type
label
A three-mask process for fabri ...... nsducers using anodic bonding.
@en
A three-mask process for fabri ...... nsducers using anodic bonding.
@nl
prefLabel
A three-mask process for fabri ...... nsducers using anodic bonding.
@en
A three-mask process for fabri ...... nsducers using anodic bonding.
@nl
P1476
A three-mask process for fabri ...... ansducers using anodic bonding
@en
P2093
F Yalçın Yamaner
P304
P356
10.1109/TUFFC.2014.006794
P577
2015-05-01T00:00:00Z