Two-step breakdown of a SiN membrane for nanopore fabrication: Formation of thin portion and penetration.
about
Two-step breakdown of a SiN membrane for nanopore fabrication: Formation of thin portion and penetration.
description
2018 nî lūn-bûn
@nan
2018年の論文
@ja
2018年学术文章
@wuu
2018年学术文章
@zh-cn
2018年学术文章
@zh-hans
2018年学术文章
@zh-my
2018年学术文章
@zh-sg
2018年學術文章
@yue
2018年學術文章
@zh
2018年學術文章
@zh-hant
name
Two-step breakdown of a SiN me ...... thin portion and penetration.
@en
Two-step breakdown of a SiN me ...... thin portion and penetration.
@nl
type
label
Two-step breakdown of a SiN me ...... thin portion and penetration.
@en
Two-step breakdown of a SiN me ...... thin portion and penetration.
@nl
prefLabel
Two-step breakdown of a SiN me ...... thin portion and penetration.
@en
Two-step breakdown of a SiN me ...... thin portion and penetration.
@nl
P2093
P2860
P1433
P1476
Two-step breakdown of a SiN me ...... thin portion and penetration.
@en
P2093
Hirotaka Hamamura
Itaru Yanagi
Ken-Ichi Takeda
Rena Akahori
P2860
P356
10.1038/S41598-018-28524-5
P407
P577
2018-07-04T00:00:00Z