Optical projection lithography at half the Rayleigh resolution limit by two-photon exposure
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Optical projection lithography at half the Rayleigh resolution limit by two-photon exposure
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im Februar 1999 veröffentlichter wissenschaftlicher Artikel
@de
wetenschappelijk artikel
@nl
наукова стаття, опублікована в лютому 1999
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name
Optical projection lithography ...... n limit by two-photon exposure
@en
Optical projection lithography ...... n limit by two-photon exposure
@nl
type
label
Optical projection lithography ...... n limit by two-photon exposure
@en
Optical projection lithography ...... n limit by two-photon exposure
@nl
prefLabel
Optical projection lithography ...... n limit by two-photon exposure
@en
Optical projection lithography ...... n limit by two-photon exposure
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P356
P1433
P1476
Optical projection lithography ...... n limit by two-photon exposure
@en
P356
10.1117/1.602092
P407
P577
1999-02-01T00:00:00Z