Positive- and Negative-Tone CVD Polyacrylic Electron-Beam Resists Developable by Supercritical CO2
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Positive- and Negative-Tone CVD Polyacrylic Electron-Beam Resists Developable by Supercritical CO2
description
im Mai 2006 veröffentlichter wissenschaftlicher Artikel
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wetenschappelijk artikel
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наукова стаття, опублікована в травні 2006
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name
Positive- and Negative-Tone CV ...... velopable by Supercritical CO2
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Positive- and Negative-Tone CV ...... velopable by Supercritical CO2
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type
label
Positive- and Negative-Tone CV ...... velopable by Supercritical CO2
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Positive- and Negative-Tone CV ...... velopable by Supercritical CO2
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prefLabel
Positive- and Negative-Tone CV ...... velopable by Supercritical CO2
@en
Positive- and Negative-Tone CV ...... velopable by Supercritical CO2
@nl
P2093
P356
P1476
Positive- and Negative-Tone CV ...... velopable by Supercritical CO2
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P2093
C. K. Ober
K. K. Gleason
N. M. Felix
P. T. Nguyen
P304
P356
10.1002/CVDE.200506416
P577
2006-05-01T00:00:00Z