Gas Phase Chemistry of Trimethylboron in Thermal Chemical Vapor Deposition

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Gas Phase Chemistry of Trimethylboron in Thermal Chemical Vapor Deposition

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http://www.wikidata.org/entity/Q57389893

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im November 2017 veröffentlichter wissenschaftlicher Artikel

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wetenschappelijk artikel

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наукова стаття, опублікована в листопаді 2017

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Gas Phase Chemistry of Trimethylboron in Thermal Chemical Vapor Deposition

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Gas Phase Chemistry of Trimethylboron in Thermal Chemical Vapor Deposition

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Gas Phase Chemistry of Trimethylboron in Thermal Chemical Vapor Deposition

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Gas Phase Chemistry of Trimethylboron in Thermal Chemical Vapor Deposition

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Gas Phase Chemistry of Trimethylboron in Thermal Chemical Vapor Deposition

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Gas Phase Chemistry of Trimethylboron in Thermal Chemical Vapor Deposition

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P1476

Gas Phase Chemistry of Trimethylboron in Thermal Chemical Vapor Deposition

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P2093

Andreas Stegmüller

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Jan Herritsch

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Laurent Souqui

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Mewlude Imam

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Susann Schmidt

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P304

26465-26471

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P31

scholarly article

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10.1021/ACS.JPCC.7B09538

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P433

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P478

121

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P577

2017-11-20T00:00:00Z

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