Observation of coherent oscillations in plasma-enhanced atomic layer deposition Ag films
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Observation of coherent oscillations in plasma-enhanced atomic layer deposition Ag films
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im Februar 2014 veröffentlichter wissenschaftlicher Artikel
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wetenschappelijk artikel
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наукова стаття, опублікована в лютому 2014
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Observation of coherent oscillations in plasma-enhanced atomic layer deposition Ag films
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Observation of coherent oscillations in plasma-enhanced atomic layer deposition Ag films
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Observation of coherent oscillations in plasma-enhanced atomic layer deposition Ag films
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Observation of coherent oscillations in plasma-enhanced atomic layer deposition Ag films
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Observation of coherent oscillations in plasma-enhanced atomic layer deposition Ag films
@en
Observation of coherent oscillations in plasma-enhanced atomic layer deposition Ag films
@nl
P2093
P2860
P356
P1476
Observation of coherent oscillations in plasma-enhanced atomic layer deposition Ag films
@en
P2093
Helen K. Gerardi
Irina R. Pala
Jeffrey C. Owrutsky
Orest J. Glembocki
Ryan Compton
S. M. Prokes
P2860
P304
P356
10.1063/1.4865495
P407
P577
2014-02-17T00:00:00Z