Metrology of semiconductor device structures by cross-sectional AFM

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Metrology of semiconductor device structures by cross-sectional AFM

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im März 2001 veröffentlichter wissenschaftlicher Artikel

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wetenschappelijk artikel

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наукова стаття, опублікована в березні 2001

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Metrology of semiconductor device structures by cross-sectional AFM

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Metrology of semiconductor device structures by cross-sectional AFM

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Metrology of semiconductor device structures by cross-sectional AFM

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Metrology of semiconductor device structures by cross-sectional AFM

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Metrology of semiconductor device structures by cross-sectional AFM

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Metrology of semiconductor device structures by cross-sectional AFM

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P1476

Metrology of semiconductor device structures by cross-sectional AFM

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P2093

C. Jenkins

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C. Meaton

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D.I. Westwood

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J.E. Macdonald

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S. Bland

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138-141

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P31

scholarly article

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10.1016/S0921-5107(00)00634-6

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P433

1-3

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P478

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Martin Elliott

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2001-03-01T00:00:00Z

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P921

Erdieroale