Defect production and annealing in ion-implanted amorphous silicon
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Defect production and annealing in ion-implanted amorphous silicon
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im Juni 1993 veröffentlichter wissenschaftlicher Artikel
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scientific article published on 01 June 1993
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wetenschappelijk artikel
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name
Defect production and annealing in ion-implanted amorphous silicon
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Defect production and annealing in ion-implanted amorphous silicon
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type
label
Defect production and annealing in ion-implanted amorphous silicon
@en
Defect production and annealing in ion-implanted amorphous silicon
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prefLabel
Defect production and annealing in ion-implanted amorphous silicon
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Defect production and annealing in ion-implanted amorphous silicon
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P1476
Defect production and annealing in ion-implanted amorphous silicon
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P2093
P304
P356
10.1103/PHYSREVLETT.70.3756
P407
P577
1993-06-01T00:00:00Z