Influence of precursors chemistry on ALD growth of cobalt-molybdenum oxide films
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Influence of precursors chemistry on ALD growth of cobalt-molybdenum oxide films
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scientific article published on 04 January 2012
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Influence of precursors chemistry on ALD growth of cobalt-molybdenum oxide films
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Influence of precursors chemistry on ALD growth of cobalt-molybdenum oxide films
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Influence of precursors chemistry on ALD growth of cobalt-molybdenum oxide films
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P2093
P356
P1433
P1476
Influence of precursors chemistry on ALD growth of cobalt-molybdenum oxide films
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P2093
Helmer Fjellvåg
Madeleine Diskus
Murugan Balasundaram
P304
P356
10.1039/C2DT11837H
P50
P577
2012-01-04T00:00:00Z