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Q30466763-FE720263-DF64-4E61-AC2B-AA8E25C258C8
Q30466763-FE720263-DF64-4E61-AC2B-AA8E25C258C8
BestRank
Statement
http://www.wikidata.org/entity/statement/Q30466763-FE720263-DF64-4E61-AC2B-AA8E25C258C8
CMUT Fabrication Based On A Thick Buried Oxide Layer.
P2860
Q30466763-FE720263-DF64-4E61-AC2B-AA8E25C258C8
BestRank
Statement
http://www.wikidata.org/entity/statement/Q30466763-FE720263-DF64-4E61-AC2B-AA8E25C258C8
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wasDerivedFrom
3b565d1bad8767a608a2f6c22ef68f8e1ed081b6
P2860
Capacitive micromachined ultrasonic transducers: fabrication technology.