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Q30478515-A08A1B9C-3FAE-44DA-A152-17E521314A5A
Q30478515-A08A1B9C-3FAE-44DA-A152-17E521314A5A
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Statement
http://www.wikidata.org/entity/statement/Q30478515-A08A1B9C-3FAE-44DA-A152-17E521314A5A
Capacitive micromachined ultrasonic transducers using commercial multi-user MUMPs process: capability and limitations.
P2860
Q30478515-A08A1B9C-3FAE-44DA-A152-17E521314A5A
BestRank
Statement
http://www.wikidata.org/entity/statement/Q30478515-A08A1B9C-3FAE-44DA-A152-17E521314A5A
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wasDerivedFrom
52bba8c232c6fc5a188a3ddd0063644e54a1a827
P2860
Capacitive micromachined ultrasonic transducers: fabrication technology.