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Q33675225-E74602D1-EEE7-4C1E-8846-F8D67D7996D6
Q33675225-E74602D1-EEE7-4C1E-8846-F8D67D7996D6
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http://www.wikidata.org/entity/statement/Q33675225-E74602D1-EEE7-4C1E-8846-F8D67D7996D6
Nanofabrication on monocrystalline silicon through friction-induced selective etching of Si3N4 mask.
P2860
Q33675225-E74602D1-EEE7-4C1E-8846-F8D67D7996D6
BestRank
Statement
http://www.wikidata.org/entity/statement/Q33675225-E74602D1-EEE7-4C1E-8846-F8D67D7996D6
rank
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type
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Statement
wasDerivedFrom
c63b24c4bcaf117babf2b4a9574b935dc9f01654
P2860
Hierarchical silicon etched structures for controlled hydrophobicity/superhydrophobicity.