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Q36389498-227F799F-0606-4043-B11B-D24023F8BAC5
Q36389498-227F799F-0606-4043-B11B-D24023F8BAC5
BestRank
Statement
http://www.wikidata.org/entity/statement/Q36389498-227F799F-0606-4043-B11B-D24023F8BAC5
Capacitive micromachined ultrasonic transducers: fabrication technology.
P577
Q36389498-227F799F-0606-4043-B11B-D24023F8BAC5
BestRank
Statement
http://www.wikidata.org/entity/statement/Q36389498-227F799F-0606-4043-B11B-D24023F8BAC5
rank
NormalRank
type
BestRank
Statement
wasDerivedFrom
d71544ac65780ea0652468229d7d703884b1a526
P577
2005-12-01T00:00:00Z
http://www.w3.org/2001/XMLSchema#dateTime
P577
b5d269e2360a3eb754afa9568b92690f