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Q36389498-E34AFE55-6A15-43D5-88E8-D0D6653700E2
Q36389498-E34AFE55-6A15-43D5-88E8-D0D6653700E2
BestRank
Statement
http://www.wikidata.org/entity/statement/Q36389498-E34AFE55-6A15-43D5-88E8-D0D6653700E2
Capacitive micromachined ultrasonic transducers: fabrication technology.
P304
Q36389498-E34AFE55-6A15-43D5-88E8-D0D6653700E2
BestRank
Statement
http://www.wikidata.org/entity/statement/Q36389498-E34AFE55-6A15-43D5-88E8-D0D6653700E2
rank
NormalRank
type
BestRank
Statement
wasDerivedFrom
d71544ac65780ea0652468229d7d703884b1a526
P304
2242-2258
http://www.w3.org/2001/XMLSchema#string