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Q39844833-C79966C5-437D-4A29-84ED-9A49A86E356F
Q39844833-C79966C5-437D-4A29-84ED-9A49A86E356F
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Statement
http://www.wikidata.org/entity/statement/Q39844833-C79966C5-437D-4A29-84ED-9A49A86E356F
High-throughput analysis of thin-film stresses using arrays of micromachined cantilever beams.
P2860
Q39844833-C79966C5-437D-4A29-84ED-9A49A86E356F
BestRank
Statement
http://www.wikidata.org/entity/statement/Q39844833-C79966C5-437D-4A29-84ED-9A49A86E356F
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wasDerivedFrom
5476d809f18470efea272f589c7b01eee1575bf9
P2860
The Tension of Metallic Films Deposited by Electrolysis