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Q50034949-39840C7A-4B98-4FFE-BA6C-885CC5662750
Q50034949-39840C7A-4B98-4FFE-BA6C-885CC5662750
BestRank
Statement
http://www.wikidata.org/entity/statement/Q50034949-39840C7A-4B98-4FFE-BA6C-885CC5662750
Metal oxide multilayer hard mask system for 3D nanofabrication.
P50
Q50034949-39840C7A-4B98-4FFE-BA6C-885CC5662750
BestRank
Statement
http://www.wikidata.org/entity/statement/Q50034949-39840C7A-4B98-4FFE-BA6C-885CC5662750
rank
NormalRank
type
BestRank
Statement
wasDerivedFrom
d418fd6f2324247f4053703899aba10d69ec4020
P1545
4
http://www.w3.org/2001/XMLSchema#string
P50
Markku Leskela