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Q52607857-71621E78-51E2-4DC4-A402-EEEFB1995878
Q52607857-71621E78-51E2-4DC4-A402-EEEFB1995878
BestRank
Statement
http://www.wikidata.org/entity/statement/Q52607857-71621E78-51E2-4DC4-A402-EEEFB1995878
Direct atomic fabrication and dopant positioning in Si using electron beams with active real-time image-based feedback.
P577
Q52607857-71621E78-51E2-4DC4-A402-EEEFB1995878
BestRank
Statement
http://www.wikidata.org/entity/statement/Q52607857-71621E78-51E2-4DC4-A402-EEEFB1995878
rank
NormalRank
type
BestRank
Statement
wasDerivedFrom
5d4e9fd0048cb0cb4c3aaa10c4688debab2a4937
P577
2018-04-04T00:00:00Z
http://www.w3.org/2001/XMLSchema#dateTime
P577
3de23028777408abbcc01384cd2e4f0c