awgldk
/
wikidata
/
Login
Register
TriplyDB
Wikidata
Browser
Table
SPARQL
Graphs
1
1
Services
1
1
Assets
0
0
Insights
Schema
BETA
Class frequency
Class hierarchy
Q54180523-23005B86-3E2E-480F-8B92-7C57341042FD
Q54180523-23005B86-3E2E-480F-8B92-7C57341042FD
BestRank
Statement
http://www.wikidata.org/entity/statement/Q54180523-23005B86-3E2E-480F-8B92-7C57341042FD
A wafer mapping technique for residual stress in surface micromachined films
P31
Q54180523-23005B86-3E2E-480F-8B92-7C57341042FD
BestRank
Statement
http://www.wikidata.org/entity/statement/Q54180523-23005B86-3E2E-480F-8B92-7C57341042FD
rank
NormalRank
type
BestRank
Statement
P31
scholarly article