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Q54180523-99CDC578-23C3-4BB2-8A64-9B9F889A914F
Q54180523-99CDC578-23C3-4BB2-8A64-9B9F889A914F
BestRank
Statement
http://www.wikidata.org/entity/statement/Q54180523-99CDC578-23C3-4BB2-8A64-9B9F889A914F
A wafer mapping technique for residual stress in surface micromachined films
P50
Q54180523-99CDC578-23C3-4BB2-8A64-9B9F889A914F
BestRank
Statement
http://www.wikidata.org/entity/statement/Q54180523-99CDC578-23C3-4BB2-8A64-9B9F889A914F
rank
NormalRank
type
BestRank
Statement
P1545
3
http://www.w3.org/2001/XMLSchema#string
P1932
S Smith
http://www.w3.org/2001/XMLSchema#string
P50
S Smith