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Q57120562-0B36E762-953E-4593-9988-FA923D8DB151
Q57120562-0B36E762-953E-4593-9988-FA923D8DB151
BestRank
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http://www.wikidata.org/entity/statement/Q57120562-0B36E762-953E-4593-9988-FA923D8DB151
Low Temperature CMUT Fabrication Process with Dielectric Lift-off Membrane Support for Improved Reliability
P2860
Q57120562-0B36E762-953E-4593-9988-FA923D8DB151
BestRank
Statement
http://www.wikidata.org/entity/statement/Q57120562-0B36E762-953E-4593-9988-FA923D8DB151
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wasDerivedFrom
b01bb060d8426f7d7904b331ee6f54b66bd1793f
P2860
Capacitive micromachined ultrasonic transducers: fabrication technology.