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s41598-017-00986-z
s41598-017-00986-z
https://scigraph.springernature.com/pub.10.1038/s41598-017-00986-z
Room-temperature field effect transistors with metallic ultrathin TiN-based channel prepared by atomic layer delta doping and deposition
P2888
Q33678460-B60C4C56-A55A-4541-ADB9-B47CB8408E01
P2888
s41598-017-00986-z
https://scigraph.springernature.com/pub.10.1038/s41598-017-00986-z