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Q36266162
Q36266162
Dataset
https://www.wikidata.org/wiki/Special:EntityData/Q36266162
Q36266162
Dataset
https://www.wikidata.org/wiki/Special:EntityData/Q36266162
about
Performance Characterization of an xy-Stage Applied to Micrometric Laser Direct Writing Lithography.
dateModified
2020-06-11T02:43:01Z
http://www.w3.org/2001/XMLSchema#dateTime
version
1,204,406,467
http://www.w3.org/2001/XMLSchema#integer
identifiers
3
http://www.w3.org/2001/XMLSchema#integer
sitelinks
0
http://www.w3.org/2001/XMLSchema#integer
statements
24
http://www.w3.org/2001/XMLSchema#integer
type
Dataset