Fluorosilicate glass
Fluorosilicate glass (FSG) is a low-k dielectric used in between copper metal layers during silicon integrated circuit fabrication process. It has a low dielectric constant (k) and is now widely adopted by semiconductor foundries on geometries sub 0.25μ.Fluorosilicate glass is effectively a fluorine-containing silicon dioxide (k=3.5, while k of undoped silicon dioxide is 3.9).
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Fluorosilicate glass
Fluorosilicate glass (FSG) is a low-k dielectric used in between copper metal layers during silicon integrated circuit fabrication process. It has a low dielectric constant (k) and is now widely adopted by semiconductor foundries on geometries sub 0.25μ.Fluorosilicate glass is effectively a fluorine-containing silicon dioxide (k=3.5, while k of undoped silicon dioxide is 3.9).
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Fluorosilicate glass (FSG) is ...... were studied as biomaterials.
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Fluorosilicate glass (FSG) is ...... doped silicon dioxide is 3.9).
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Fluorosilicate glass
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