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385304
385304
http://dx.doi.org/10.1088/0957-4484/20/38/385304
Dose and energy dependence of mechanical properties of focused electron-beam-induced pillar deposits from Cu(C5HF6O2)2.
P356
Q33497715-83B826D2-4BFF-424C-AC80-60DAE3195EEE
P356
385304
http://dx.doi.org/10.1088/0957-4484/20/38/385304