Sub-100 nm silicon nanowires by laser interference lithography and metal-assisted etching.
about
Quasi-radial growth of metal tube on si nanowires template.Selective formation of tungsten nanowiresVersatile pattern generation of periodic, high aspect ratio Si nanostructure arrays with sub-50-nm resolution on a wafer scaleThe nanostructuring of surfaces and films using interference lithography and chalcogenide photoresist.Versatile control of metal-assisted chemical etching for vertical silicon microwire arrays and their photovoltaic applications.Lithography-free fabrication of silicon nanowire and nanohole arrays by metal-assisted chemical etchingOrdered arrays of nanoporous silicon nanopillars and silicon nanopillars with nanoporous shells.Highly doped silicon nanowires by monolayer doping.
P2860
Q33944961-67448A03-69FC-4FF8-A5A1-6492B97C34E2Q34039665-EE0C533A-D02B-4C1B-ABEF-6EFFA6DB95D1Q34447622-7A2C3F6D-3811-4612-A46C-6FA63A707EC5Q35265727-02540012-44F0-4C3E-8F84-9BC4DAA7885EQ35710649-CBAEE86A-99CE-4AC5-9FA3-2962DEADB3E8Q36821250-C45E87C3-08E3-42E8-A124-BBA0E9EE7DBEQ42172807-021C3717-FADC-425F-9392-3F6B5DC0044BQ48267916-F2576818-CC4F-4BB9-A411-39BD04D770F9
P2860
Sub-100 nm silicon nanowires by laser interference lithography and metal-assisted etching.
description
2010 nî lūn-bûn
@nan
2010 թուականի Յունուարին հրատարակուած գիտական յօդուած
@hyw
2010 թվականի հունվարին հրատարակված գիտական հոդված
@hy
2010年の論文
@ja
2010年論文
@yue
2010年論文
@zh-hant
2010年論文
@zh-hk
2010年論文
@zh-mo
2010年論文
@zh-tw
2010年论文
@wuu
name
Sub-100 nm silicon nanowires b ...... hy and metal-assisted etching.
@ast
Sub-100 nm silicon nanowires b ...... hy and metal-assisted etching.
@en
Sub-100 nm silicon nanowires b ...... hy and metal-assisted etching.
@nl
type
label
Sub-100 nm silicon nanowires b ...... hy and metal-assisted etching.
@ast
Sub-100 nm silicon nanowires b ...... hy and metal-assisted etching.
@en
Sub-100 nm silicon nanowires b ...... hy and metal-assisted etching.
@nl
prefLabel
Sub-100 nm silicon nanowires b ...... hy and metal-assisted etching.
@ast
Sub-100 nm silicon nanowires b ...... hy and metal-assisted etching.
@en
Sub-100 nm silicon nanowires b ...... hy and metal-assisted etching.
@nl
P2093
P356
P1433
P1476
Sub-100 nm silicon nanowires b ...... hy and metal-assisted etching.
@en
P2093
Johannes de Boor
Jörg V Wittemann
Nadine Geyer
Ulrich Gösele
Volker Schmidt
P304
P356
10.1088/0957-4484/21/9/095302
P577
2010-01-29T00:00:00Z