Approaching Gas Phase Electrodeposition: Process and Optimization to Enable the Self-Aligned Growth of 3D Nanobridge-Based Interconnects.
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Approaching Gas Phase Electrodeposition: Process and Optimization to Enable the Self-Aligned Growth of 3D Nanobridge-Based Interconnects.
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name
Approaching Gas Phase Electrod ...... anobridge-Based Interconnects.
@en
Approaching Gas Phase Electrod ...... anobridge-Based Interconnects.
@nl
type
label
Approaching Gas Phase Electrod ...... anobridge-Based Interconnects.
@en
Approaching Gas Phase Electrod ...... anobridge-Based Interconnects.
@nl
prefLabel
Approaching Gas Phase Electrod ...... anobridge-Based Interconnects.
@en
Approaching Gas Phase Electrod ...... anobridge-Based Interconnects.
@nl
P2093
P2860
P356
P1433
P1476
Approaching Gas Phase Electrod ...... anobridge-Based Interconnects.
@en
P2093
Heiko O Jacobs
Jörg Pezoldt
Leslie Schlag
Se-Chul Park
Thomas Stauden
P2860
P304
P356
10.1002/ADMA.201503039
P407
P50
P577
2015-12-21T00:00:00Z