FEM Analysis of Sezawa Mode SAW Sensor for VOC Based on CMOS Compatible AlN/SiO₂/Si Multilayer Structure.
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FEM Analysis of Sezawa Mode SAW Sensor for VOC Based on CMOS Compatible AlN/SiO₂/Si Multilayer Structure.
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2018年の論文
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FEM Analysis of Sezawa Mode SA ...... /SiO₂/Si Multilayer Structure.
@en
FEM Analysis of Sezawa Mode SA ...... /SiO₂/Si Multilayer Structure.
@nl
type
label
FEM Analysis of Sezawa Mode SA ...... /SiO₂/Si Multilayer Structure.
@en
FEM Analysis of Sezawa Mode SA ...... /SiO₂/Si Multilayer Structure.
@nl
prefLabel
FEM Analysis of Sezawa Mode SA ...... /SiO₂/Si Multilayer Structure.
@en
FEM Analysis of Sezawa Mode SA ...... /SiO₂/Si Multilayer Structure.
@nl
P2093
P2860
P356
P1433
P1476
FEM Analysis of Sezawa Mode SA ...... /SiO₂/Si Multilayer Structure.
@en
P2093
Aamir Farooq Malik
Asif Iqbal
Muhammad Zubair Aslam
Saravanan Karuppanan
Varun Jeoti
P2860
P356
10.3390/S18061687
P407
P577
2018-05-24T00:00:00Z