Chip-Scale Mass Manufacturable High-Q Silicon Microdisks
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Chip-Scale Mass Manufacturable High-Q Silicon Microdisks
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wetenschappelijk artikel
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наукова стаття, опублікована у квітні 2017
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Chip-Scale Mass Manufacturable High-Q Silicon Microdisks
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Chip-Scale Mass Manufacturable High-Q Silicon Microdisks
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Chip-Scale Mass Manufacturable High-Q Silicon Microdisks
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Chip-Scale Mass Manufacturable High-Q Silicon Microdisks
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Chip-Scale Mass Manufacturable High-Q Silicon Microdisks
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Chip-Scale Mass Manufacturable High-Q Silicon Microdisks
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P2093
P2860
P356
P1476
Chip-Scale Mass Manufacturable High-Q Silicon Microdisks
@en
P2093
Qinghai Song
Shumin Xiao
Wenzhao Sun
Yujie Wang
Yunfeng Xiao
P2860
P304
P356
10.1002/ADMT.201600299
P577
2017-04-18T00:00:00Z