Preliminary results on x-ray lithography using a compact plasma focus

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Preliminary results on x-ray lithography using a compact plasma focus

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wetenschappelijk artikel

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наукова стаття, опублікована в серпні 1997

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Preliminary results on x-ray lithography using a compact plasma focus

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Preliminary results on x-ray lithography using a compact plasma focus

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Preliminary results on x-ray lithography using a compact plasma focus

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Preliminary results on x-ray lithography using a compact plasma focus

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Preliminary results on x-ray lithography using a compact plasma focus

@en

Preliminary results on x-ray lithography using a compact plasma focus

@nl

P1476

Preliminary results on x-ray lithography using a compact plasma focus

@en

P2093

A. Thang

http://www.w3.org/2001/XMLSchema#string

Adrian Serban

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C. Selvam

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Guan Zhang

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K. Wira

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Mahe Liu

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Paul C. K. Lee

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Sing Lee

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Stuart V. Springham

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Terence K. S. Wong

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P31

scholarly article

P356

10.1117/12.280532

http://www.w3.org/2001/XMLSchema#string

P577

1997-08-14T00:00:00Z

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