Residual stress, intermolecular force, and frictional properties distribution maps of diamond films for micro- and nano-electromechanical (M/NEMS) applications
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Residual stress, intermolecular force, and frictional properties distribution maps of diamond films for micro- and nano-electromechanical (M/NEMS) applications
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wetenschappelijk artikel
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наукова стаття, опублікована в грудні 2006
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name
Residual stress, intermolecula ...... chanical (M/NEMS) applications
@en
Residual stress, intermolecula ...... chanical (M/NEMS) applications
@nl
type
label
Residual stress, intermolecula ...... chanical (M/NEMS) applications
@en
Residual stress, intermolecula ...... chanical (M/NEMS) applications
@nl
prefLabel
Residual stress, intermolecula ...... chanical (M/NEMS) applications
@en
Residual stress, intermolecula ...... chanical (M/NEMS) applications
@nl
P2093
P2860
P356
P1476
Residual stress, intermolecula ...... chanical (M/NEMS) applications
@en
P2093
O.A. Williams
R.J. Patel
P2860
P304
P356
10.1557/JMR.2006.0372
P577
2006-12-01T00:00:00Z