Optimized Design, Fabrication and Characterization of PZT Unimorph Microactuators for Deformable Mirrors
Optimized Design, Fabrication and Characterization of PZT Unimorph Microactuators for Deformable Mirrors
description
wetenschappelijk artikel
@nl
наукова стаття, опублікована у 2004
@uk
name
Optimized Design, Fabrication ...... tuators for Deformable Mirrors
@en
Optimized Design, Fabrication ...... tuators for Deformable Mirrors
@nl
type
label
Optimized Design, Fabrication ...... tuators for Deformable Mirrors
@en
Optimized Design, Fabrication ...... tuators for Deformable Mirrors
@nl
prefLabel
Optimized Design, Fabrication ...... tuators for Deformable Mirrors
@en
Optimized Design, Fabrication ...... tuators for Deformable Mirrors
@nl
P356
P1476
Optimized Design, Fabrication ...... tuators for Deformable Mirrors
@en
P2093
Jian-Gong Cheng
Yoshikazu Hishinuma
P356
10.1115/IMECE2004-62070
P577
2004-01-01T00:00:00Z