Fabrication of sub-20 nm patterns using dopamine chemistry in self-aligned double patterning
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Fabrication of sub-20 nm patterns using dopamine chemistry in self-aligned double patterning
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im November 2018 veröffentlichter wissenschaftlicher Artikel
@de
scientific article published on 01 November 2018
@en
wetenschappelijk artikel
@nl
наукова стаття, опублікована в листопаді 2018
@uk
name
Fabrication of sub-20 nm patte ...... self-aligned double patterning
@en
Fabrication of sub-20 nm patte ...... self-aligned double patterning
@nl
type
label
Fabrication of sub-20 nm patte ...... self-aligned double patterning
@en
Fabrication of sub-20 nm patte ...... self-aligned double patterning
@nl
prefLabel
Fabrication of sub-20 nm patte ...... self-aligned double patterning
@en
Fabrication of sub-20 nm patte ...... self-aligned double patterning
@nl
P2093
P356
P1433
P1476
Fabrication of sub-20 nm patte ...... self-aligned double patterning
@en
P2093
Jaewon Choi
Thomas P Russell
Yinyong Li
Zhiwei Sun
P304
20779-20784
P356
10.1039/C8NR04040K
P407
P577
2018-11-01T00:00:00Z