Tensorial Model for Photolithography Aerial Image Simulation

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Tensorial Model for Photolithography Aerial Image Simulation

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wetenschappelijk artikel

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наукова стаття, опублікована у 2009

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Tensorial Model for Photolithography Aerial Image Simulation

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Tensorial Model for Photolithography Aerial Image Simulation

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Tensorial Model for Photolithography Aerial Image Simulation

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Tensorial Model for Photolithography Aerial Image Simulation

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Tensorial Model for Photolithography Aerial Image Simulation

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Tensorial Model for Photolithography Aerial Image Simulation

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P1476

Tensorial Model for Photolithography Aerial Image Simulation

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P2093

Antonio Di Giacomo

http://www.w3.org/2001/XMLSchema#string

Caroline Fossati

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Romuald Sabatier

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Salah Bourennane

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P2860

A new look at the statistical model identification

Fast approximation of transfer cross coefficient for optical proximity correction.

A Multilinear Singular Value Decomposition

P304

1-9

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P31

scholarly article

P356

10.1155/2009/457549

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P478

2009

http://www.w3.org/2001/XMLSchema#string

P577

2009-01-01T00:00:00Z

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