Research Update: Atmospheric pressure spatial atomic layer deposition of ZnO thin films: Reactors, doping, and devices
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Research Update: Atmospheric pressure spatial atomic layer deposition of ZnO thin films: Reactors, doping, and devices
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article
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wetenschappelijk artikel
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наукова стаття, опублікована у квітні 2015
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Research Update: Atmospheric p ...... Reactors, doping, and devices
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Research Update: Atmospheric p ...... Reactors, doping, and devices
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Research Update: Atmospheric p ...... Reactors, doping, and devices
@en
Research Update: Atmospheric p ...... Reactors, doping, and devices
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Research Update: Atmospheric p ...... Reactors, doping, and devices
@en
Research Update: Atmospheric p ...... Reactors, doping, and devices
@nl
P2093
P2860
P356
P1433
P1476
Research Update: Atmospheric p ...... Reactors, doping, and devices
@en
P2093
Andrea Illiberi
David Muñoz-Rojas
Fred Roozeboom
Judith L. MacManus-Driscoll
Paul Poodt
Robert L. Z. Hoye
Shelby F. Nelson
P2860
P304
P356
10.1063/1.4916525
P577
2015-04-01T00:00:00Z