A surface-micromachined resonant-beam pressure-sensing structure
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A surface-micromachined resonant-beam pressure-sensing structure
description
wetenschappelijk artikel
@nl
наукова стаття, опублікована у 2001
@uk
name
A surface-micromachined resonant-beam pressure-sensing structure
@en
A surface-micromachined resonant-beam pressure-sensing structure
@nl
type
label
A surface-micromachined resonant-beam pressure-sensing structure
@en
A surface-micromachined resonant-beam pressure-sensing structure
@nl
prefLabel
A surface-micromachined resonant-beam pressure-sensing structure
@en
A surface-micromachined resonant-beam pressure-sensing structure
@nl
P2093
P356
P1476
A surface-micromachined resonant-beam pressure-sensing structure
@en
P2093
E. Kalvesten
P304
P356
10.1109/84.967371
P577
2001-01-01T00:00:00Z