Reducing intrinsic loss in superconducting resonators by surface treatment and deep etching of silicon substrates
about
Reducing intrinsic loss in superconducting resonators by surface treatment and deep etching of silicon substrates
description
im Mai 2015 veröffentlichter wissenschaftlicher Artikel
@de
wetenschappelijk artikel
@nl
наукова стаття, опублікована в травні 2015
@uk
name
Reducing intrinsic loss in sup ...... etching of silicon substrates
@en
Reducing intrinsic loss in sup ...... etching of silicon substrates
@nl
type
label
Reducing intrinsic loss in sup ...... etching of silicon substrates
@en
Reducing intrinsic loss in sup ...... etching of silicon substrates
@nl
prefLabel
Reducing intrinsic loss in sup ...... etching of silicon substrates
@en
Reducing intrinsic loss in sup ...... etching of silicon substrates
@nl
P2093
P356
P1476
Reducing intrinsic loss in sup ...... etching of silicon substrates
@en
P2093
G. de Lange
K. L. van der Enden
L. DiCarlo
N. K. Langford
P304
P356
10.1063/1.4919761
P407
P577
2015-05-04T00:00:00Z
P818
1502.04082