Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films
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Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films
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im September 2009 veröffentlichter wissenschaftlicher Artikel
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wetenschappelijk artikel
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наукова стаття, опублікована у вересні 2009
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name
Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films
@en
Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films
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type
label
Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films
@en
Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films
@nl
prefLabel
Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films
@en
Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films
@nl
P2093
P356
P1476
Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films
@en
P2093
C. Marcoux
G. Le Rhun
M. H. Matheny
M. L. Roukes
P. Andreucci
R. B. Karabalin
X. L. Feng
P304
P356
10.1063/1.3216586
P407
P577
2009-09-07T00:00:00Z